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TEL Tokyo Electron 300mm Wafer 4 Nozzle COT Coat Process Station Lithius Surplus Run Time: UndeterminedTEL Tokyo Electron 300mm Wafer 4 Nozzle COT Coat Process Station Lithius Surplus Model No: COT Coat Process Station 4 Nozzle Removed from a TEL Tokyo Electron 300mm Clean Track Lithius System Sold As Is Parts List (approximation, parts may vary or not be included or installed) Part No: 5085 405081 1H, BASE ASSY Part No: 5087 400387 1C, E BOX ASSY Part No: 5087 400383 14, FRAME ASSY,MOTOR Part No: 5087 400384 18, 3PIN ASSY Part No: 5085 404544 1B,